Y = 1/[ 1/YH + 1/YL ]
YH is the High velocity fit and YL is the Low velocity fit,
with Y = Z^m * C1 * [(V/Vau)/Z^(1/3)]^C2
The values of m, C1, C2 are
given
for each material for velocity in atomic
units (Vau = 2.19 x 10^8 cm/s). The standard
deviation
includes all of the available
sputtering data, but the fit is not good for
protons.
Except for low velocity
heavy
ions, C1 is found to vary, roughly as
(cos (theta))^-1.6, where theta is the angle of
incidence.
| Solid | T(K) | Angle | m | C1_High* | C2_High | dev* | C1_Low* | C2_Low | dev |
| H2O | <100 | 0 deg | 2.8 | 11.22 | -2.24 | 0.07 | 4.20 | 2.16 | 0.24 |
| H2O | <100 | 45 | 2.8 | no | no | x | 22.99 | 2.08 | 0.25 |
| CO | <100 | 45 | 2.8 | 479.62 | -2.62 | 0.10 | 19.62 | 1.08 | 0.04 |
| N2 | <100 | 0 | 2.8 | 26.26 | -1.87 | 0.11 | 51.75 | 3.19 | 0.07 |
| O2 | <100 | 0 | 2.8 | 209.22 | -2.24 | 0.23 | 53.94 | 1.86 | 0.03 |
| SO2 | <100 | 0 | 2.8 | 122.38 | -3.11 | 0.18 | 6.94 | 1.75 | 0.15 |
* High : high
energy,
Low : low energy, dev : standard deviation
no -- no data available