Groves research group
Department of Materials Science and Engineering
University of Virginia

"Directed Vapor Deposition"
James F. Groves

Ph.D. Dissertation, University of Virginia, 1998.

Each section of this dissertation is presented below in Adobe Acrobat format. The Adobe Acrobat Reader version 5 necessary to view these files correctly  is available for free from Adobe.

This disseration is © copyrighted by the University of Virginia, All Rights Reserved.

Download the dissertation as a single file here.
Abstract

Quote

Acknowledgements

List of Figures

List of Tables

List of Symbols

Table of Contents

Chapter 1
Introduction

  • Vapor Phase Synthesis of Materials
  • Applications Motivating Vapor Phase Process Development
  • Goals of the Dissertation
Chapter 2
Background
  • Vapor Creation Using an Electron Beam Gun
  • Vapor Transport
  • Vapor Adsorption and Diffusion on a Substrate
  • Summary
Chapter 3
Invention of Directed Vapor Deposition

Chapter 4
DVD System Design

  • Electron Beam Gun
  • Processing Chamber
  • Crucible
  • Gas System
  • Vacuum Pumps
  • Vacuum Gauges
  • Substrate Temperature Control System
  • Computer Control Methodology
  • Concluding Remark
Chapter 5
Experimental Investigation of Vapor Transport
  • Overview
  • Available Processing Regime
  • Visual Observations of Gas Stream
  • Gas Flow / Vapor Stream / Substrate Interactions
  • Concluding Remarks
Chapter 6
Materials Synthesis Via Directed Vapor Deposition
  • Overview
  • Contamination Study of Nonreactive Deposition
  • Study of Silicon Deposition
  • Study of Reactive Deposition
  • Concluding Remarks
Chapter 7
Experimental Investigations of Deposition Efficiency
  • Overview
  • Deposition Efficiency Experimental Procedures
  • Flat Substrate Results
  • Fiber Substrate
  • Clustering
  • Summary
Chapter 8
Vapor Transport Model Development
  • Direct Simulation Monte Carlo (DSMC) Modeling of the Flowfield
  • Bimolecular Collision Theory (BCT) Modeling of Vapor Transport
  • Summary
Chapter 9
Vapor Transport Model Verification
  • Verification of DSMC Results
  • BCT Model Verification
  • Summary
Chapter 10
Vapor Transport Modeling of DVD
  • Vapor Transport Predictions
  • Vapor Deposition Predictions
  • Summary
Chapter 11
DVD System Development
  • Reconfiguration of the Gun, Vapor Source, and Carrier Gas Flow
  • Substrate Bias
  • Impact of Changes in Vapor Flux Upon Carrier Gas Flow
  • Experimental Work
  • Model Development
  • Concluding Remarks
Chapter 12
Discussion
  • Focus, Efficiency, and Angular Distribution
  • Non-line-of-sight Coating
  • Vapor Stream Mixing
  • Enhanced Energy Deposition
  • Rapid, Continuous Processing of Pure Materials and Compounds
  • Other Applications
  • Other System Configurations
  • Summary
Chapter 13
Conclusions
  • Specific Conclusions
  • Final Thought
References

Appendix A
DVD Specifications

  • E-beam Gun Design Drawings
  • Processing Chamber Design Drawings
  • Water-Cooled Crucible Design Drawings
  • Processing Chamber Pumping Capacity Design Calculations
Appendix B
Clustering Calculations

Appendix C
Flowfield Modeling Code

Appendix D
Atom Tracking Code

Appendix E
E-beam Vapor Distribution